Low-temperature growth of low friction wear- resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering
نویسندگان
چکیده
Konstantinos D. Bakoglidis, Susann Schmidt, Magnus Garbrecht, Ivan G. Ivanov, Jens Jensen, Grzegorz Greczynski and Lars Hultman, Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering, Journal of Vacuum Science & Technology. A, 2015, 33(5), 05E112 . http://dx.doi.org/10.1116/1.4923275 Copyright: American Vacuum Society http://www.avs.org/
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